Micro and Nanoscale Fabrication Engineering

(Same as CHEMENG 140) Survey of fabrication and processing technologies in industrial sectors, such as semiconductor, biotechnology, and energy. Chemistry and transport of electronic and energy device fabrication. Solid state materials, electronic devices and chemical processes including crystal growth, chemical vapor deposition, etching, oxidation, doping, diffusion, thin film deposition, plasma processing. Micro and nanopatterning involving photolithography, unconventional soft lithography and self assembly. Recommended: CHEM 33, 171, and PHYSICS 55