Introduction to Micro and Nano Electromechanical Systems

Miniaturization technologies now have important roles in materials, mechanical, and biomedical engineering practice, in addition to being the foundation for information technology. This course will target an audience of first-year engineering graduate students and motivated senior-level undergraduates, with the goal of providing an introduction to M/NEMS fabrication techniques, selected device applications, and the design tradeoffs in developing systems. The course has no specific prerequisites, other than graduate or senior standing in engineering; otherwise, students will require permission of the instructors.